CCBS-IR-单片IR式净化烧成炉-安捷来国际股份（香港）有限公司手机版

CCBS-IR单片IR式净化烧成炉

参考价: 面议

产品简介

单片IR式净化烧成炉：CleanstructurewithnodustcausedbyitselfFar-infraredradiation(IR)heatingsystemhasbeenadopted

Clean structure with no dust caused by itself
Far-infrared radiation(IR) heating system has been adopted.
The process with high efficiency is available for various kinds of the film thickness.
The IR panel heater with excellent temperature uniformity has been adopted.
The uniform heating is available for such a large substrate as the 10th Generation.
By introducing N2 gas into the oven, it is available to have a heating process under low Oxygen(O2) density.

Available glass size		~W3000×L3200mm
Temperature range		80~250℃
Temperature uniformity		±3℃
Cleanliness		Class 10 (0.3μm)
Applications		Baking of Polyimide coating, Annealing, Baking of passivation film, Seal main curing/pre curing

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