VF-1000-R&D, 少量生产用立式炉-安捷来国际股份（香港）有限公司手机版

VF-1000R&D, 少量生产用立式炉

参考价: 面议

产品属性

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安捷来国际股份（香港）有限公司

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产品简介

RD1000H2100mmHeaterLGOheaterFlatzonelength160to250mmWafersizeto8inchBatchsizeto25wafersControllerModel880OptionForced-coolingsystem

High performance processing for R&D
Mini Batch, max 25 wafers batch processing
2 to 8 inch and 300mm wafer size are available
Equipped with LGO heater to realize high temperature performance as mass-production equipment
Equipped with limited function simple control system

Outer dimension		W1500×D1000×H2100mm
Heater		LGO heater
Flat zone length		160 to 250mm
Wafer size		to 8inch
Batch size		to 25wafers
Controller		Model 880
Option		Forced-cooling system, N₂ load lock, 25 to 150 wafers of processing (VF-2000)

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