1200℃立式管式炉 双温区(BTF-1200C-II-VT)/Double zones vertical tube furnace
品牌
经销商厂商性质
合肥市所在地
1200℃双温区CVD系统(低真空、高真空)型号:BTF-1200C-II-CVD
面议双温区滑轨式PECVD系统PECVD-II-500A
面议纳米线生长专用设备
面议碳纳米纤维膜系统 BTF-1400C-CN-80
面议流化床—粉体碳纳米管生长设备
面议连续进出料等离子体增强回转PECVD设备-BTF-1200C-RP-PECVD
面议回转CVD设备 BTF-1200C-V-R-280
面议分体式升华设备将热场置于手套箱(简易款)
面议半导体前驱体提纯仪/药品提纯仪/去金属离子提纯仪(试验级)
面议实验级升华仪BOF-7-100(新款)
面议实验级升华仪BOF-5-50
面议升华仪 BOF-7-100
面议主要特点Main features:
1) 管内设计了气氛喷射器可将实验所需气氛直接喷射在物料处,有助于反应更充分。
Atmosphere injector design inside tube can directly inject the necessary atmosphere onto materials to help react more fully.
2) 样品平放在内管上可以实现内管和外管同时通气体,平放的样品有助于薄膜生长,电极测试,温度更均匀。
Sample put horizontally on the inner tube can let gas flow into outer/inner tube simultaneously, and horizontal sample is helpful for film growth& electrode test, with evener temperature.
3) 该设备也具有可作为氧化物晶体生长,退火等功能。
The device can also make oxide crystals grow, and anneal, etc.
技术参数Technical Parameters:
Power 输入电源 | Power rated: 5KW(208-240V) 额定功率:5KW(208-240V) | ||||
Voltage 电压 | Voltage rated: AC208-240V 50/60HZ 额定电压:AC208-240V 50/60HZ | ||||
Working Temperature 工作温度 | Max. Temperature: 1200℃( 1 hr) 温度:1200℃ (1小时) Continuous working temperature: ≤1100℃ 持续工作温度:≤1100℃ Recommended heating Rate: ≤15℃/min 推荐升温速率:≤15℃/分 | ||||
Temperature Controller 控温方式 | PID automatic control and auto-tune function. 模糊PID控制和自整定调节 30 programmable segments for precise thermal processing. 智能化30段可编程控制 Built-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 | ||||
Length of heating zone 加热区长度 | 200+200mm | ||||
Length of constant zone 恒温区长度 | 100+100mm | ||||
Heating Elements 加热元件 | Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝(掺钼铁铬铝合金) | ||||
Temperature Accuracy 控温精度 | +/- 1℃ | ||||
Processing tube 炉管 | Tube size:Φ50*1000mm 炉管尺寸:Φ50*1000mm Two tube blocks are included for blocking heat radiation generated from tube center, must be fully inserted into the furnace chamber before heating(quartz or ceramic optional) 两个管堵阻挡管中心产生的热辐射,必须在加热前塞进炉膛的正确位置(石英和氧化铝可选) | ||||
Dimensions 尺寸 | Furnace size: 590*380*500mm(L*W*H without tube & flange) 炉子尺寸:590*380*500mm(长*宽*高 不含炉管和法兰) Shipping size: 620×650×1480mm 包装尺寸:620×650×1480 | ||||
Net Weight 净重 | 60kg | ||||
Shipping Weight 毛重 | 90kg | ||||
Vacuum Flange 真空法兰 | Special designed flanges 定制法兰
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Vacuum Pressure 真空压力 | 1pa can be achieved by mechanical pump 机械泵可达1pa 10^-4 pa can be reached by molecular pump 分子泵可达10^-4pa Please click the picture below to order vacuum parts 点击下列图片订购真空部件 | ||||
Warranty 质保 | One year limited warranty with lifetime support (Such consumable parts as tube, quartz block, and O-rings, etc. are NOT supported by the warranty) 一年质保终身支持(消耗品如炉管,石英管堵,O型圈等不在质保范围内) | ||||
Warning 注意事项 | Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating. 在使用过程中炉膛表面可能出现细小裂纹。这是正常情况,裂纹可以用氧化铝涂层修复。 | ||||
Compliance 认证 | CE Certified CE认证 The furnace is ready to pass TUV (UL61010) or CSA certification at extra cost. 可付费进行TUV(UL61010)或CSA认证 |