Model | MPC600 |
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Method | RIE •DPmode | Electrode | Aluminumroundtype | RFgenerator | 50 - 600W | Oscillatingfrequency | 13.56MHz | Controlsystem | Digitaldisplaywith one touch operation | Chamber | Adapted for 6inchwafer | Chambermaterial | SUS | Reactiongas | O2,Ar,CF4 | Purge gas | N2 orDryair | Flow meter | Massflowcontrol | Vacuumpump | 5000L/min | Gas system | 2 line(Reactiongas) , 1 line (Purge) | Externaldimension | (W)650 x (D)700x(H)1,480mm | Powersupply | AC200/220/380V3phase 25A |
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