| Model | PR-1000 |
|---|
 MainUnit |
| Chambersize | ø300×500(D)mm |
| Chambermethod | Quartzglass |
| Electrode | Condenser(4division) |
| Plasmamode | DP mode |
| Vacuumgauge | Capacitancemanometer T |
| Reactiongas system | wosystem(CF4, O2) |
| Maincontroller | PLCcontroller |
| Display | LCDcolordisplayａnd Touch panel (5.7 inch) |
| Door | Manualopen,swingtype |
| ExternalDimension | 700(W)×820(D)×1600(H)mm |
| Radio-FrequencyPower Supply |
| Inputvoltage | AC200V8A50/60Hz |
| Radio-frequency output power | 10 to1000W |
| Referenceoscillator | Quartzoscillator |
| Oscillating frequency | 13.56MHz |
| Outputsetting system | Digitalsetting |
| Matchingadjustment | Automatictuning |
| VacuumPump |
| Displacement | 670L/min. |
| Inputpower supply | 3 phaseAC200V11A50/60Hz |
| InletConfiguration | NW40 |
| OutletConfiguration | NW40 |
| GasSystem |
| Purgegas | N2 |
| Reactiongas control | Massflowcontroller CF4 (F.S.300sccm)
O2 (F.S.300sccm) |
| System Protectionof Equipment |
- Protect over current,Builtinprotect over current of Vacuum pump, RF power supplyandmainunit
- Protect quartzoscillator,Whenmatching unit have miss matching, Automatic RF powerdownandprotect quartz oscillator
- Door panel inter lock, Builtininterlock switch
- External coversafetylockswitch
- Emergency stop switch
|
| SystemProtections by Software in PLC |
When occurredfollowingconditions,Equipment stop and Error will display. - In case of RF power is outofsettingvalue.
- In case of gas flow (CF4, O2) is out of setting flow rate.
- In case of RFW powerisoverpermission value.
- In case of Vacuum pressuredoesnotreach within setting time.
- After finish plasmaprocess,chamberdoes not become atmosphere.
|
| Utility |
| Electricpower supply | 3 phaseAC380V20A50/60Hz (Total system) with down transformer |
| CF4 gas | 0.15to0.25Mpa |
| O2 gas | 0.15to0.25Mpa |
| PressureAir | 0.4 to0.6Mpafordriving air valve |
| Connectingsize | 1/4swagelok |
