| Model | V-1000 | V-1000X | V-1000XS |
|---|
 PlasmaMode | RIEａnd DP |
| MainUnit |
| Electrodestructure | Parallel flat stage plate |
| Stagesize | 280mmW×280mmD | 300mmW×300mmD(Double stage) | 400mmW×375mmD |
| Chambersize | 400mmW×400mmD×380mmH | 400mmW×400mmD×380mmH | 600mmW×554mmD×440mmH |
| Vacuumgauge | Capacitance manometer |
| Reactiongas system | Twosystems |
| Controller | Programmable controller |
| Display | Programmable terminal (touch panel) |
| Radio-FrequencyPower Supply |
| Input | AC200/220/380V,Three phase, |
| Radio-frequency output power | 1,000W | 1,000& 1,500W |
| Referenceoscillator | Quartz oscillator |
| Oscillating frequency | 13.56MHz |
| Matchingadjustment | Automatic tuning |
| Discharge System(Vacuum Pump) |
| Displacement | 670 &1,000liters/min. | 670 &1,500liters/min. | 1,000 &1,500liters/min. |
| Inletconfiguration | NW40with a flexible stainless steel hose (1 meter long) |
| Outletconfiguration | NW40 |
| GasSystems |
| Purgegas | Nitrogen (N2) and a regulator (3 kgf/cm2) withamanometer |
| Drivinggas | Airornitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) withamanometer |
| Reactiongas G1 | Oxygen (O2) and a mass flow controller (1000 secm) |
| Reactiongas G2 | Argon(Ar) and a mass flow controller (100 secm) |
| SafetyMechanisms |
| SystemProtections | *Oscillator protection circuit *Front-door interlockswitch(interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuumleaktest function
*Air-purge end buzzer *Alarm buzzer *Emergency stoppush-buttonswitch |
| Actions againstatrouble of the vacuum pump | Theplasma scrubber takes the counteractions listed below andshow anAlarm message on its display when something wrong happens onthevacuum pump.
*The main valve closes *The gas feed valve closes *Theisolationvalve closes
*The oscillator stops outputting *Treatment process issuspended*The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble ofthevacuum pump
*The treatment process timer stops |
| REQUIREDUTILITIES |
 PowerSupply |
| Main unitwith vacuum pump | Threephases, AC220V, 30 A, 60Hz (with an accessory power cableof 3meters long, and exposed crimp-style terminals of 8millimeterslong) |
| Gases |
| Drivinggas | Airornitrogen (N2) (Feed pressure: 5～7 kgf/cm2) |
| Purgegas | Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2) |
| Reactiongas G1 | Oxygen (O2) (Feed pressure: 1.5 kgf/cm2) |
| Reactiongas G2 | Argon(Ar) (Feed pressure: 1.5 kgf/cm2) |
| Connectionport | 1/4"swagelok joint bulkhead union (SS-400-61) |
| | Note:Pressure regulators, filters and other protective devicesshall beprepared by others. |
| Connection Diameter of the Discharge Duct (ａnd inletPort) |
| Vacuumpump's inlet port | NW4O(with a flexible stainless steel hose of 1 meterlong) |
| Vacuumpump's outlet port | NW4O |
| Mainunit's ozone outlet port | 163mmdiameter |
| Oscillator's ventilation port | 163mmdiameter |
| | Note:Every port has a connector designed for a flexible hose.Connect aduct to these inlet and outletports. |
