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Dosing- and closing valve
Protects tools against pressure >1.5 bar; Trigger point is adjustable between 1.2 and 1.5 bars abslout.
Venting valve
Compact valves provide short cycle times
High vacuum angle valves with bellows feedthrough. Modular design.
Manually operated diaphragm valves with forged body and robust actuator.
Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design.
Inline valve with shaft feedthrough for large gas flows.
High vacuum cylinder valve
High vacuum cylinder valve
High vacuum Cylinder valves
High vacuum angle valve with bellows feedthrough and large conductance.
High vacuum angle valves with bellows feedthrough. Modular design.
Standard HV inline valve with bellows feedthrough.
For large gas flows we recommend Series 24.
UHV angle valves. Extremely low outgassing rate.
Offers reduced turbulence during initial pump down giving low particle count.
Offers reduced turbulence during initial pump down giving low particle count.
Offers reduced turbulence during initial pump down giving low particle count.
All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 300°C in the open and closed position. Fixed CF-R rotating flanges for CF edge protection and easy mounting. Easy seal replacement - two times a leak on the seat can easily be repaired on site. Highly radiation resistant.
ID63, 100 and 160. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring closing actuator. Manual closing is performed with a specified torque. Bakeable to 300°C in open and closed position. High conductance. Radiation resistant.
ID 10, 16 and 40. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head) ID16 and 40, double acting pneumatic actuator or spring closing actuator. The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 450°C in the open position and to 350°C in the closed position (DN10 max. 250°C). High conductance. Radiation resistant.
All metal variable leak valve for precise, reproducible adjustment of gas flows. Available with manual actuator (knurled knot) or stepper motor driven. Closing to a mechanical stop to give a reliable leak tight position without the risk of over tightening. Bakeable to 300°C in the open and closed position and no requirement for lubrication during the specified lifetime.
