5851E: Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures 

流量范围：10slpm-100slpm     精度：1% FS     压力：100bar     1500psig   温度：65℃  150F       信号：0-5V