5850E: Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
The Brooks Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

流量范围：3sccm-30slpm     精度：1% FS     压力：100bar     1500psig   温度：65℃  150F       信号：0-5V