5853E: Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

流量范围：100slpm-1000slpm     精度：1% FS     压力：100bar     1500psig   温度：65℃  150F       信号：0-5V