AZ 1000美国APTECH调节器AZ 1000系列毕尔途专业高
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面议总览
AP Tech,也称为高级压力技术,是气体处理部件的制造商,主要是压力调节器和阀门。 AP Tech的长处是通过超高纯度应用提供高纯度特种气体的产品。从源容器到使用点,再到处理工具或设备本身,*,AP Tech产品可提供质量,性能和可靠性不受影响的气体。该公司为服务和支持设定了终标准,这些特征现已成为AP Tech品牌的代名词。
各种各样的气体输送产品可满足大多数应用。从腐蚀性气体源面板的挑战到工艺使用点所需的精细控制,AP Tech产品在压力下均可提供高性能。
该公司由行业人士Rene Zakhour于1987年成立。他的目标是制造以服务和支持为后盾的可靠产品。如今,AP Tech现已成为我们半导体和电子行业主要市场的*,在他的下,并在他的工作中追求的敦促下,我们继续努力实现Rene的目标。就这么简单。
美国APTECH调节器AZ 1000系列毕尔途专业高
压力调节器
AP Tech的各种调节器的入口压力范围高达10,000 psig(690 bar),输送压力从压力到10,000 psig(690 bar)。流量也有很大的范围,从几sccm到数千slpm。无论是手动弹簧加载还是气动驱动,连接尺寸为1/8英寸至1英寸,AP Tech都是通过超高纯气体输送实现高纯度的优选调节器。
Operating Parameters
Source pressure vacuum to 3,500 psig (241 bar)
AZ 1001 and TF option vacuum to 300 psig (21 bar)
Delivery pressure AZ 1001 1 to 10 psig (0.07 to 0.7 bar)
AZ 1002 1 to 30 psig (0.07 to 2 bar)
AZ 1006 2 to 60 psig (0.14 to 4 bar)
AZ 1010 2 to 100 psig (0.14 to 7 bar)
AZ 1015 5 to 150 psig (.34 to 10 bar)
AZ 1030 5 to 300 psig (.34 to 21 bar)
Proof pressure 150% of operating pressures
Burst pressure 300% of operating pressures
SS 316L construction
• 10 µin. surface finish(25 µin. optional)
• Vacuum to 3500 psig(241 bar) inlet
• 1 to 300 psig (0.07 to 21bar) outlet
• Cleaned, assembled and packaged for high purity semiconductor applications
• Flow rates- Standard to 30 slpm - HF option to 120 slpm
• Regulator of choice for point of use applications
• Knob LOTO (refer to AP KL data sheet)
• Installation and operating instructions available at
美国APTECH调节器AZ 1000系列毕尔途专业高
in the Tech Briefs section
Other Parameters
Inlet/outlet connectors 1/4 or 3/8 inch face seal or tube weld
Flow coefficient (Cv) 0.09 (0.15 HF option)
Internal volume 0.49 in3 (8 cm3)
Operating temperature -40° to +160°F (-40° to +71°C)*
Surface finish 10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
Inboard leakage 2 x 10-10 sccs
Outboard leakage 2 x 10-9 sccs He
Leakage across seat 4 x 10-8 sccs He
Installation surface or panel (optional)
Supply pressure effect 0.25 psig per 100 psig source pressure change
HF 0.75 psig per 100 psig source pressure change
材质:316不锈钢
Sample Order Number AZ 1010SQ 2PW FV4 FV4
AZ1010S3PWFV4MV40
AZ1010S2PWFV4MV4
AZ1010S 2PW FV4 MV4
AZ 1010 | Series
AZ 1001 = 1-10 psig (.07 to .7 bar)
AZ 1002 = 1-30 psig (.07 to 2 bar)
AZ 1006 = 2-60 psig (.14 to 4 bar)
AZ 1010 = 2-100 psig (.14 to 7 bar)
AZ 1015 = 5-150 psig (.34 to 10 bar)
AZ 1030 = 5-300 psig (.34 to 21 bar)
S | Material
S = Stainless steel (SS)
SHP = SS/Ni-Cr-Mo alloy poppet and
S diaphragm
Q | Surface
Finish Option
Q = 25 µin. Ra avg.
2PW | Ports
2PW = 2 ports butt weld
3PW = 3 ports butt weld
4PW = 4 ports butt weld
FV4 FV4 | Connections
Inlet / Outlet
FV4 = 1/4 inch face seal female
MV4 = 1/4 inch face seal male
FV6 = 3/8 inch face seal female
MV6 = 3/8 inch face seal male
Tube weld stub available
Delivery
Gauge*
0 = No gauge
V3 = 30-0-30 psig/bar
L = 30-0-60 psig/bar
1 = 0-100 psig/bar
H = 30-0-160 psig/bar
4 = 0-400 psig/bar
10 = 0-1000 psig/bar
40 = 0-4000 psig/bar
* Standard gauge port is 1/4 inch face seal male
(1/4 inch face seal female are available).
Options
VS = Polyimide seat
TF = PTFE seat
HF = High flow
P = Panel installation**
KL = Knob LOTO (refer to AP KL data sheet)
** Panel hole 1.569 diameter.