型号描述

型号 8713 是一台用于调节气体质量流量的装置，适合工艺技术领域内大多数的用途。在数字的电子调节设备中，会将以硅芯片为基础的传感器（参见第 2 页的描述）提供的数值，与规定的额定值进行比较；存在调节偏差时，会通过一种 PI 调节算法对发送到比例阀上的调节参数进行修改，由此补偿调节偏差。因为传感器直接处于气流中，所以设备的反应时间非常短。质量流量可以保持在一个确定的数值上，或遵循规定的额定值曲线轮廓，而不会受到压力波动或设备中其他变化的影响。

1）采用 CMOSens® 技术的直接流量测量装置，适合额定流量范围 20 mlN/min 至 80 lN/min (N2)
2）高精度
3）反应快速
4）紧凑型结构和数字通讯

Type Description

The mass flow controller (MFC) type 8713 is suited for regulating the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8713 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. The mass flow controller type 8713 fits for various applications, like e.g. burner controls, heat treatment, material coatings, bio reactors, fuel cell technology or test benches.

1）Nominal flow ranges from 0.010 lN/min to 80 lN/min
2）High accuracy and repeatability
3）Very fast settling times
4）Digital communication via RS485
5）Compact version

气体质量流量控制器部分订货号如下：

667530 KOMP-800-8713-G667-530-00-