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洁净N2置换送风定温干燥器

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2026-06-15上海市
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产品简介
洁净N2置换送风定温干燥器
详细信息

Feature

  • A heat resistant high-performance filter and our unique cooling unit are installed to enable high-temperature baking.

  • The chamber interior can keep class 100 (ISO: Class 5) cleanliness when the temperature is stable.

  • There are 2 hot-air blow types, front side blow horizontal circulation (type V) and side blow (type III). Both achieve high thermal efficiencies and good temperature uniformity.

  • This type of ovens is optimal for semiconductor wafer and glass substrate baking, aging and other heat treatments requiring high accuracies.

  • Inert gases can be introduced into the chambers to use the ovens as inert gas ovens.


ApplicationsBaking and curing for semiconductor wafers and glass substrate



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