产品简介
The PlasmaPro 800 offers a flexible solution for Plasma Enhanced Chemical Vapour Deposition (PECVD) processes on large wafer batches and 300mm wafers, in a compact footprint, open-loading system. The ......
详细信息
PlasmaPro 800具有460mm直径的工作台,拥有处理整片的300mm晶圆或大批量43 x 50mm(2”)晶圆的能力, 可提供全套量产解决方案。PlasmaPro 800是的市场前列产品。