关于美国博曼（BOWMAN）X荧光镀层测厚仪原理：
对被测样品发射一次X射线，样品的原子吸收X射线的能量后被激发并释放出二次X射线。通过测量被释放出的二次X射线的特征能量和强度，就能够对被测样品的镀层厚度和成份进行定性和定量分析。
X荧光新技术
• Different types of detectors
?Improved resolution
?Improved stability
?Prolonged life
• Various X-ray tube targets
?Optimized for challenging applications
?Cr, Mo, W, Rh, etc.
•X-ray optics
?Poly capillary optics
?Halo reduction optics
• Modular design
?Miniaturized components
?Low component cost
?Better serviceability
检测器的发展
正比计数器
• Xe, Ne, or other halogen gas filled
• Drift with temperature or/and humidity change
• 10,000~30,000 cps
• 800~1200eV at Mnresolution
• Shorter life (2~5 years)
PIN 检测器
• Thermoelectrically cooled (Peltier)
• Be window
• Count rates: 3000~50,000 cps
• Resolution: 170~240eV at Mn K a
• 10+ years life
硅漂移检测（SDD）
• Thermoelectrically cooled (Peltier)
• Be window or Carbon based material
• Light element capability (i.e. P, Si, Al)
• Count rates: 10,000~1,000,000 cps
• Resolution: 120~170eV at Mn K a• 10+ years life
固态检测器的优点
• Phosphorus analysis electroless Ni
• Improved detection ldown to Angstrom olevel
• Separation of overlaelements
• Improved stability wiminimal drift
• Less maintenance1um Au/5um Ni/Inf Cu
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