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美国博曼(BOWMAN)X荧光测厚仪原理

时间:2019-07-24      阅读:1374

关于美国博曼(BOWMAN)X荧光镀层测厚仪原理:

对被测样品发射一次X射线,样品的原子吸收X射线的能量后被激发并释放出二次X射线。通过测量被释放出的二次X射线的特征能量和强度,就能够对被测样品的镀层厚度和成份进行定性和定量分析。

 

X荧光新技术

Different types of detectors

?Improved resolution

?Improved stability

?Prolonged life

Various X-ray tube targets

?Optimized for challenging applications

?Cr, Mo, W, Rh, etc.

X-ray optics

?Poly capillary optics

?Halo reduction optics

Modular design

?Miniaturized components

?Low component cost

?Better serviceability

检测器的发展

 

正比计数器 

Xe, Ne, or other halogen gas filled

Drift with temperature or/and humidity change

10,000~30,000 cps

800~1200eV at Mnresolution

Shorter life (2~5 years)

 

PIN 检测器

Thermoelectrically cooled (Peltier)

Be window

Count rates: 3000~50,000 cps

Resolution: 170~240eV at Mn K a

10+ years life

硅漂移检测(SDD

Thermoelectrically cooled (Peltier)

Be window or Carbon based material

Light element capability (i.e. P, Si, Al)

Count rates: 10,000~1,000,000 cps

Resolution: 120~170eV at Mn K a10+ years life

固态检测器的优点

Phosphorus analysis electroless Ni

Improved detection ldown to Angstrom olevel

Separation of overlaelements

Improved stability wiminimal drift

Less maintenance1um Au/5um Ni/Inf Cu

 

 

 

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