Ultra High Vacuum Piezo Stages and Systems

Ultra High Vacuum Piezo Stages and Systems

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2023-03-13 09:52:42
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北京埃光科技有限公司

北京埃光科技有限公司

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产品简介

Most of SmarActs stages are specially prepared for operation under vacuum conditions.

详细介绍

商品描述

Most of SmarAct's stages are specially prepared for operation under vacuum conditions.


SmarAct’s stages and systems are not only perfectly suited for applications under atmo-spheric conditions, but in some cases also for more extreme environments like high vacuum  (HV, 10-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar).


Most of the stages presented on this website are available in versions specially prepared for operation under vacuum conditions.

UHV versions are bakeable at up to 150 °C and are available with two different cable types:


1、The cost efficient version utilizes Teflon insulated wires.

2、The Kapton® insulated version is a fluorine free solution.

Since SmarAct is a full solution provider, HV and UHV positioning systems are supplied with matching electrical feedthroughs. As standard, SmarAct uses:


1、HV as bulkhead LEMO® feedthroughs which are O-ring sealed.

2、UHV tightly welded designs for the use in UHV.

You are very welcome to contact our application scientists at any time to discuss your specific re-quirements.

For vacuum compatible stages of the SLC-17 and SLC-24 series that require post-installation baking, we recommend opting for the U-shaped base to increase the overall stiffness of the stage.


Please note that the U-shaped base has the usual mounting hole pattern, but increases the width of the stage itself by 6 mm. This changes the width of an SLC-17 stage to 23 mm and the width of an SLC-24 stage to 30 mm. Omitting the U-shaped base option is only advisable if compactness is the top requirement.



Atmospheric Conditions

High Vacuum (HV)

Ultra-High Vacuum (UHV)

Ultra-High Vacuum (UHVT)

Pressure

--

Down to 1E-6 mbar

Down to 1E-11 mbar

Down to 1E-11 mbar

Wiring

Teflon-insulated stranded wires with braided shield and Teflon coating

Teflon-insulated stranded wires with braided shield

Kapton-insulated stranded wires

Teflon-insulated stranded wires with braided shield

Grease

Standard grease

HV compatible grease

Grease-free

Grease-free

Sensor Options

S, L, I

S

S

S

Bake-Out Temperatur

--

Up to 130°C upon request

Recommended 130°C (max. 150°C)

Recommended 130°C (max. 150°C)

Vacuum Feedthrough

--

LEMO feedthroughs

- O-ring tightened by a screw nut

- Flanges available upon request

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange

- DN40CF or DN63CF flange, other sizes upon reques

LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange

- DN40CF or DN63CF flange, other sizes upon request


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