OTF-1200X-5-III-SF 5"滑动法兰1200℃三温区CVD系统-北京壮仕科技有限公司手机版

详细介绍

OTF1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.

One 5" O.D x 1400mm L fused quartz tube and one pair of vacuum sealing flanges with pressure gauge；
Three 30 segments temperature controllers are installed with K type thermal couple. Microprocessor-based self-tuning PID control provides excellent control without overshootingａnd +/- 1 oC accuracy；
800mm long sliding rail is installed with one end flange to make loading & unload sample at easy；
Two carts are included to support furnace and sliding rail；
Three flowmeters (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed in one of cart, which allow to use three types of gas during heat treatment；
One mechanical pump with KF25 adaptor and SS pipe are included with furnace；
One digital vacuum gauge is installed on the flange for easy vacuum pressure reading upto10 -4 torr；
Click picture below to enlarge and to see details；


digital vacuum gauge,SS vacuum pipe & ball valve with KF25 adaptor garantee 10-2 torr vacuum	2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal.	5" Quartz tube can accommodate 4" quartz wafer boat without holder.

Specifications:
Furnace structure	● Double layer steel case with two cooling fan, which ensures low surface temperature ● Energy saving high purity fibrous alumina insulation ● 内炉膛表面涂有美国进口的高温氧化铝涂层可以提高设备的加热效率，同时也可以延长炉膛的使用寿命 ● One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge ● One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included.
Voltage & Power	● AC 208-240V Single Phase, 50/60 Hz (40A breaker required) ● Powder cord is included without plug ● 7 KW Max
Max. Temperature	1200℃
Continuous Temperature	1100℃
Max. Heating Rate	≤20℃/min
Tube Size and Flange	● 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included ● Vacuum flanges with valves and pressure gauge are included. Click picture below to see details
Heating Zone Length	Three zones: (900mm, 36" in total) ● Zone 1: 229mm (9") ● Zone 2: 457mm (18.0") ● Zone 3: 229 mm (9")
Constant Temp. Zone	● If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within +/- 1℃ ● If using one zone (center zone), constant temperature zone is 4.3" (110 mm) length within +/- 1℃
Temperature Controllers	● Three Digital Controllers, and each has 30-segement ● Built in protection from over-heated and broken thermo couple
Temperature Accuracy	+/- 1℃
Heating Element	Fe-Cr-Al Alloy doped by Mo
Dimension	1080 X 430 x 600mm
Net Weight	about 70 kg
Warranty & Certificate	● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) ● CE Certificate
Shipping package size after crating	65x45x35" ( x2)
Shipping weight	540 lbs
Shipping weight	● Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment.( click picture below left to see detail specs) ● wo carts are included to allow flange sliding onthe table ● Optional: for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost ( click picture below to see details ) 3 Channels Float-meter gas control 3 channels MFC gas control (optional)

产品简介

详细介绍