采用Sharck-Hartmann技术的波前传感器 波前分析仪,用于对激光光束分析,测量光束的波前参数。能测量M^2,激光光斑直径,束腰位置及发散角等光束参数,同时软件可测出系统的PSF及MTF。
此刻哈特曼波前传感器 波前分析仪 指标参数如下所示:
Specification:
Range of phase measurement - up to 15μm
Accuracy of measurements - λ/100 (RMS)
Input light beam diameter - 4...100 mm and more
Number of working sub-apertures: from 400
Working Wavelength Range: 400nm 1100nm
Acquisition Frequency / Frame Rate: up to 60 Hz
Pulsed & CW laser beam diagnostic
The hardware includes:
Lenslet array
Monochrome CCD/CMOS camera (IEEE 1394)
IEEE 1394 Cable (6pin-6pin)
Optionally:
Resizing lens or telescopic system
Neutral density optical Filters in holder
Source of reference wavefront (collimator, fiber-coupled laser for one
wavelength, holder)
The software includes:
Wavefront Reconstruction for Circular pupil or Polygonal Mask
Measurement of P-V
Definition of RMS
Shark r Page 1 of 2
Shark-Hartmann Wavefront
-Hartmann Wavefront Senso
Expansion of aberrations to Seidel and Zernike polynomials (tilts, defocus,
astigmatisms, etc.)
Fringe Representation, 2D & 3D Wavefront
Reconstruction of intensity distribution
Estimation of the Beam Quality Factor M²; Beam Characterisation Parameters:
laser beam diameter, beam waist & location, Beam Divergence
PSF, MTF