高纯度靶材采用美国Princeton Scientific金属、非金属和化合物制成的溅射靶材,纯度在99.9%到99.9999%之间。
高纯度靶材可提供单元素纯金属和定制化合物。各种几何形状；圆形、矩形、多层瓦和阶梯式结构都可提供。
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高纯度靶材信息，请查看我们的标准和专业目标列表。我们可以根据您的具体需求生产溅射靶材.我们将帮助您选择合适的目标材料、制造工艺和粘接组件，以确保薄膜沉积工艺的成功。
我们的溅射靶材是通过熔融或粉末冶金工艺制备的。
高纯度靶材列表 | 材料 | 分子式 | 可提供纯度 |
| 铝Aluminum | Al | 99.9% - 99.9995% |
| 锑化铝Aluminum antimonide | AlSb | 99.99% |
| 硼化铝Aluminum boride | AlB2 | 99.5% |
| 氟化铝Aluminum fluoride | AlF3 | 99.9% - 99.99% |
| 氮化铝Aluminum nitride | AlN | 99.5% |
| 氧化铝Aluminum oxide | Al2O3 | 99.9% - 99.99% |
| 磷化铝Aluminum phosphide | AlP | 99.95% |
| 氮氧化铝Aluminum oxynitride | Al3NO3H2O | 99.50% |
| 锑Antimony | Sb | 99.99% - 99.999% |
| Antimony (III) sulfide | Sb2S3 | 99.9% - 99.99% |
| Antimony oxide | Sb2O3 | 99.9% - 99.99% |
| Antimony telluride | Sb2Te3 | 99.99% - 99.999% |
| Arsenic | As | 99.9% - 99.9999% |
| Arsenic oxide | As2O3 | 99.9% |
| Arsenic telluride | As2Te3 | 99.99% |
| Barium strontium titanate | BST | 99.9% - 99.95% |
| Barium sulfide | BaS | 99.9% |
| Barium zirconate | BaZr03 | 99.5% |
| Barium ferrite | BaFe12O19 | 99.9% |
| Barium fluoride | BaF2 | 99.9% - 99.99% |
| Barium oxide | BaO | 99.5% - 99.9% |
| Barium titanate | BaTiO(3) | 99.9% - 99.99% |
| | | |
| Bismuth | Bi | 99.9% - 99.999% |
| Bismuth oxide | Bi2O3 | 99.9% - 99.999% |
| Bismuth sulfide | Bi2S3 | 99.9% - 99.99% |
| Bismuth telluride | Bi2Te3 | 99.9% - 99.999% |
| Bismuth titanate | Bi4Ti3O12 | 99.9% - 99.99% |
| | | |
| Boron | B | 99% - 99.999% |
| Boron carbide | B4C | 99.5% |
| Boron nitride | BN | 99.5% - 99.9% |
| Boron oxide | B2O3 | 99.9% |
| | | |
| Cadmium | Cd | 99.9% - 99.99% |
| Cadmium arsenide | Cd3As2 | 99.9% - 99.99% |
| Cadmium chloride | CdCl2 | 99.9% |
| Cadmium fluoride | CdF2 | 99.9% - 99.99% |
| Cadmium oxide | CdO | 99.9% - 99.99% |
| Cadmium selenide | CdSe | 99.9% - 99.999% |
| Cadmium stannate | Cd2SnO4 | 99.9% - 99.99% |
| Cadmium sulfide | CdS | 99.9% - 99.999% |
| Cadmium telluride | CdTe | 99.9% - 99.999% |
| | | |
| Calcium fluoride | CaF2 | 99.9% - 99.99% |
| Calcium oxide | CaO | 99.95% |
| Calcium sulfide | CaS | 99.9% - 99.95% |
| Calcium titanate | CaTiO3 | 99.9% |
| Calcium phosphate | Ca3(PO4)2 | 99.90% |
| Calcium phosphate tribasic | Ca10 (OH)2 (PO4)6 | 99.90% |
| | | |
| Carbon | C | 99.9% - 99.999% |
| | | |
| Cerium | Ce | 99.9% - 99.95% |
| Cerium fluoride | CeF3 | 99.9% - 99.95% |
| Cerium oxide | CeO2 | 99.5% - 99.95% |
| | | |
| Cesium fluoride | CsF | 99.9% - 99.99% |
| Cesium iodide | CsI | 99.9% - 99.95% |
| | | |
| Chromium | Cr | 99.5% - 99.999% |
| Chromium oxide | CrO3 | 99.9% |
| Chromium boride | CrB2 | 99.9% |
| Chromium carbide | Cr3C2 | 99.9% |
| Chromium fluoride | CrF3 | 99.9% |
| Chromium nitride | Cr2N | 99.9% - 99.99 |
| Chromium oxide | Cr2O3 | 99.9% - 99.95% |
| Chromium silicide | CrSi2 | 99.9% - 99.95% |
| Chromium sulfide | Cr2S3 | 99.9% |
| | | |
| Cobalt | Co | 99.9% - 99.999% |
| Cobalt ferrite | CoFe2O4 | 99.9% |
| Cobalt oxide | CoO | 99.9% - 99.95% |
| Cobalt oxide | Co3O4 | 99.95% |
| Cobalt silicide | CoSi2 | 99.5% - 99.95% |
| | | |
| Copper | Cu | 99.9% - 99.9999% |
| Copper (II) sulfide | CuS | 99.9% - 99.95% |
| Copper oxide | Cu2O | 99.9% - 99.99% |
| Copper oxide | CuO | 99.9% - 99.99% |
| Copper phosphide | Cu3P | 99.9% |
| Copper selenide | CuSe | 99.9% - 99.99% |
| Copper sulfide | Cu2S | 99.9% |
| | | |
| Dysprosium | Dy | 99.9% - 99.95% |
| Dysprosium fluoride | DyF3 | 99.9% - 99.99% |
| Dysprosium oxide | Dy2O3 | 99.9% - 99.99% |
| | | |
| Erbium fluoride | ErF3 | 99.9% - 99.95% |
| Erbium oxide | Er2O3 | 99.9% - 99.99% |
| | | |
| Europium | Eu | 99.9% |
| Europium oxide | Eu2O3 | 99.9% - 99.99% |
| | | |
| Gadolinium | Gd | 99.9% |
| Gadolinium fluoride | Gd2F3 | 99.9% |
| Gadolinium gallium garnet | Gd3Ga5O12 | 99.9% |
| | | |
| Gallium | Ga | 99.99% - 99.9999% |
| Gallium antimonide | GaSb | 99.99% - 99.999% |
| Gallium arsenide | GaAs | 99.9% - 99.999% |
| Gallium nitride | GaN | 99.9% - 99.99% |
| Gallium oxide | Ga2O3 | 99.9% - 99.99% |
| | | |
| Germanium | Ge | 99.99% - 99.999% |
| Germanium nitride | Ge3N4 | 99.9% |
| Germanium oxide | GeO2 | 99.9% - 99.99% |
| Germanium selenide | GeSe2 | 99.99% |
| Germanium sulfide | GeS | 99.99% |
| Germanium telluride | GeTe | 99.99% - 99.999% |
| | | |
| Gold | Au | 99.9% - 99.999% |
| | | |
| Hafnium | Hf | 99.5% |
| Hafnium (IV) fluoride | HfF4 | 99.9% |
| Hafnium boride | HfB2 | 99.5% - 99.9% |
| Hafnium carbide | HfC | 99.5% |
| Hafnium oxide | HfO2 | 99.5% - 99.95% |
| | | |
| Holmium | Ho | 99.9% |
| Holmium oxide | Ho2O3 | 99.9% - 99.95% |
| | | |
| Indium | In | 99.9% - 99.9999% |
| Indium telluride | In2Te3 | 99.9% - 99.999% |
| Indium antimonide | InSb | 99.9% - 99.999% |
| Indium nitride | InN | 99.9% - 99.99% |
| Indium oxide | In2O3 | 99.99% - 99.999% |
| Indium phosphide | InP | 99.99% |
| Indium selenide | In2Se3 | 99.95% - 99.999% |
| Indium oxide/Tin oxide (ITO) | In2O3/SnO2 | 99.99% - 99.999% |
| | | |
| Iridium | Ir | 99.9% - 99.99% |
| Iridium oxide | IrO2 | 99.9% |
| | | |
| Iron | Fe | 99.9% - 99.99% |
| Iron boride | FeB | 99.5% - 99.99% |
| Iron carbide | Fe3C | 99.9% |
| Iron nickel oxide | NiFe2O4 | 99.5% - 99.9% |
| Iron nitride | FeN4 | 99.9% |
| Iron oxide | Fe2O3 | 99.9% - 99.99% |
| Iron oxide | Fe3O4 | 99.9% - 99.99% |
| Iron silicide | FeSi2 | 99.9% - 99.99% |
| Iron disulfide | FeS2 | 99.9% - 99.995% |
| | | |
| Lanthanum | La | 99.9% |
| Lanthanum aluminate | LaAlO3 | 99.5% |
| Lanthanum boride | LaB6 | 99.5% - 99.9% |
| Lanthanum strontium manganate | (La0.7Sr0.3)MnO3 | 99.9% |
| Lanthanum titanate | LaTiO3 | 99.9% |
| | | |
| Lead | Pb | 99.9% - 99.99% |
| Lead (II) oxide | PbO | 99.9% - 99.99% |
| Lead selenide | PbSe | 99.9% - 99.99% |
| Lead telluride | PbTe | 99.9% - 99.999% |
| Lead titanate | PbTiO3 | 99.9% - 99.99% |
| | | |
| Lithium carbonate | Li2CO3 | 99.9% |
| Lithium cobalt oxide | LiCoO2 | 99.9% |
| Lithium fluoride | LiF | 99.9% - 99.99% |
| Lithium manganese oxide | LiMn2O4 | 99.9% |
| Lithium niobium oxide | LiNbO3 | 99.9% |
| Lithium oxide | Li2O | 99.9% |
| Lithium peroxide | Li2O2 | 99.9% |
| Lithium phosphate | Li3PO4 | 99.9% - 99.99% |
| Lithium sulfate | Li2SO4 | 99.9% |
| Lithium sulfide | Li2S | 99.9% - 99.99% |
| Lithium tetraborate | Li3BO4 | 99.99% |
| Lithium titanate | Li2TiO3 | 99.9% |
| | | |
| Lutetium | Lu | 99.9% - 99.95% |
| Lutetium oxide | Lu2O3 | 99.9% - 99.99% |
| | | |
| Magnesium | Mg | 99.9% - 99.99% |
| Magnesium aluminate | MgAl2O4 | 99.9% |
| Magnesium diboride | MgB2 | 99.9% |
| Magnesium fluoride | MgF2 | 99% - 99.99% |
| Magnesium oxide | MgO | 99.9% - 99.99% |
| Magnesium silicide | Mg2Si | 99.9% |
| Magnesium sulfide | MgS | 99.9% |
| | | |
| Manganese | Mn | 99.9% - 99.95% |
| Manganese fluoride | MnF2 | 99.9% |
| Manganese Nitride | MnN4 | 99.9% |
| Manganese oxide | MnO | 99.9% |
| Manganese oxide | MnO2 | 99.9% |
| Manganese oxide | Mn2O3 | 99.9% |
| Manganese selenide | MnSe | 99.95% |
| Manganese sulfide | MnS | 99.9% - 99.95% |
| Manganese telluride | MnTe | 99.9% - 99.95% |
| | | |
| Mercury selenide | HgSe | 99.99% - 99.999% |
| Mercury telluride | HgTe | 99.9% - 99.99% |
| | | |
| Molybdenum | Mo | 99.9% - 99.99% |
| Molybdenum boride | MoB | 99.5% |
| Molybdenum carbide | MO2C | 99.9% |
| Molybdenum disulfide | MoS2 | 99.5% - 99.9% |
| Molybdenum oxide | MoO3 | 99.9% |
| Molybdenum oxide | MoO2 | 99.9% |
| Molybdenum selenide | MoSe2 | 99.9% - 99.99% |
| Molybdenum silicide | MoSi2 | 99.9% - 99.99% |
| Molybdenum telluride | MoTe2 | 99.9% - 99.99% |
| | | |
| Neodymium | Nd | 99.9% |
| | | |
| Nickel | Ni | 99.8% - 99.999% |
| Nickel boride | Ni2B | 99.5% |
| Nickel disilicide | NiSi2 | 99.9% |
| Nickel oxide | NiO | 99% - 99.995% |
| Nickel telluride | NiTe | 99.9% |
| | | |
| Niobium | Nb | 99.8% - 99.99% |
| Niobium carbide | NbC | 99.5% |
| Niobium oxide | Nb2O5 | 99.9% - 99.999% |
| Niobium oxide | NbO2 | 99.9% - 99.99% |
| Niobium selenide | NbSe2 | 99.9% |
| | | |
| Osmium | Os | 99.9% - 99.95% |
| | | |
| Palladium | Pd | 99.9% - 99.995% |
| Palladium oxide | PdO | 99.9% - 99.95% |
| | | |
| Phosphorus oxide | P2O5 | 99.95% |
| | | |
| Platinum | Pt | 99.9% - 99.999% |
| | | |
| Praseodymium | Pr | 99.9% |
| | | |
| Rhenium | Re | 99.9% - 99.99% |
| | | |
| Rhodium | Rh | 99.9% - 99.99% |
| Rhodium oxide | Rh2O3 | 99.9% |
| | | |
| Ruthenium | Ru | 99.9% - 99.99% |
| Ruthenium oxide | RuO2 | 99.9% |
| | | |
| Samarium | Sm | 99.9% |
| Samarium fluoride | SmF3 | 99.9% - 99.95% |
| Samarium oxide | Sm2O3 | 99.9% - 99.99% |
| | | |
| Scandium | Sc | 99.9% - 99.99% |
| Scandium oxide | Sc2O3 | 99.9% - 99.99% |
| | | |
| Selenium | Se | 99.9% - 99.9999% |
| Selenium oxide | SeO2 | 99.9% |
| | | |
| Silicon | Si | 99.9% - 99.999% |
| Silicon carbide | SiC | 99.5% - 99.9% |
| Silicon dioxide | SiO2 | 99.9% - 99.999% |
| Silicon monoxide | SiO | 99.9% - 99.99% |
| Silicon nitride | Si3N4 | 99.5% - 99.9% |
| Silicon sulfide | SiS2 | 99.5% - 99.99% |
| | | |
| Silver | Ag | 99.9% - 99.99% |
| Silver chloride | AgCl | 99.9% |
| Silver oxide | Ag2O | 99.9% |
| | | |
| Sodium aluminum fluoride | Na5Al3F14 | 99.5% |
| Sodium carbonate | Na2CO3 | 99.9% |
| Sodium chloride | NaCl | 99.9% |
| Sodium fluoride | NaF | 99.9% |
| Sodium oxide | Na2O2 | 99.9% |
| | | |
| Strontium carbonate | SrCO3 | 99.9% |
| Strontium fluoride | SrF2 | 99.9% |
| Strontium molybdate | SrMoO4 | 99.9% |
| Strontium oxide | SrO | 99.9% |
| Strontium ruthenate | SrRuO3 | 99.9% |
| Strontium sulfide | SrS | 99.9% |
| Strontium titanate | SrTiO3 | 99.9% - 99.95% |
| Strontium zirconate | SrZrO3 | 99.9% |
| | | |
| Sulfur | S | 99.9% |
| | | |
| Tantalum | Ta | 99.9% - 99.99% |
| Tantalum carbide | TaC | 99.9% |
| Tantalum nitride | TaN | 99.5% |
| Tantalum pentoxide | Ta2O5 | 99.9% - 99.99% |
| Tantalum selenide | TaSe2 | 99.9% |
| Tantalum silicide | TaSi2 | 99.5% - 99.9% |
| | | |
| Tellurium | Te | 99.9% - 99.999% |
| Tellurium oxide | TeO2 | 99.9% - 99.99% |
| | | |
| Terbium | Tb | 99.9% |
| Terbium fluoride | TbF3 | 99.9% |
| Terbium fluoride oxide | TbOF | 99.9% |
| Terbium oxide | Tb4O7 | 99.9% - 99.95% |
| | | |
| Tin | Sn | 99.9% - 99.999% |
| Tin (IV) fluoride | SnF2 | 99.9% |
| Tin oxide | SnO2 | 99.9% - 99.99% |
| Tin Sulfide | SnS2 | 99.9% |
| Tin telluride | SnTe | 99.9% - 99.99% |
| | | |
| Titanium | Ti | 99.9% - 99.999% |
| Titanium aluminide | Ti3Al | 99.90% |
| Titanium boride | TiB2 | 99.50% |
| Titanium carbide | TiC | 99.9% |
| Titanium dioxide | TiO2 | 99.9% - 99.999% |
| Titanium fluoride | TiF3 | 99.90% |
| Titanium monoxide | TiO | 99.9% - 99.999% |
| Titanium nitride | TiN | 99.5% - 99.99% |
| Titanium oxide | Ti2O3 | 99.900% |
| Titanium selenide | TiSe2 | 99.9% - 99.99% |
| Titanium silicide | TiSi2 | 99.5% - 99.95% |
| | | |
| Tungsten | W | 99.9% - 99.999% |
| Tungsten carbide | WC | 99.5% |
| Tungsten oxide | WO3 | 99.9% - 99.99% |
| Tungsten selenide | WSe2 | 99.9% |
| Tungsten silicide | WSi2 | 99.9% - 99.95% |
| Tungsten sulfide | WS2 | 99.9% |
| Tungsten telluride | WTe2 | 99.9% - 99.99% |
| | | |
| Vanadium | V | 99.5% -99.9% |
| Vanadium carbide | VC | 99.5% |
| Vanadium dioxide | VO2 | 99.9% |
| Vanadium nitride | VN | 99.9% |
| Vanadium oxide | V2O3 | 99.9% |
| Vanadium pentoxide | V2O5 | 99.9% - 99.99% |
| Vanadium selenide | VSe2 | 99.9% |
| Vanadium sulfide | V2S3 | 99.9% |
| | | |
| Ytterbium | Yb | 99.9% |
| Ytterbium fluoride | YbF3 | 99.95% |
| Ytterbium oxide | Yb2O3 | 99.9% - 99.99% |
| | | |
| Yttrium | Y | 99.9% - 99.99% |
| Yttrium aluminum oxide | Y3Al5O12 | 99.9% |
| Yttrium ferrite | Y3Fe5O12 | 99.9% |
| Yttrium fluoride | YF3 | 99.9% - 99.99% |
| Yttrium oxide | Y2O3 | 99.9% - 99.99% |
| | | |
| Zinc | Zn | 99.9% - 99.999% |
| Zinc fluoride | ZnF2 | 99.9% - 99.99% |
| Zinc nitride | Zn3N2 | 99.9% |
| Zinc oxide | ZnO | 99.9% - 99.999% |
| Zinc phosphide | Zn3P2 | 99.9% |
| Zinc selenide | ZnSe | 99.99% - 99.995 |
| Zinc sulfide | ZnS | 99.9% - 99.99% |
| Zinc telluride | ZnTe | 99.99% |
| | | |
| Zirconium | Zr | 99.5% - 99.9 |
| Zirconium boride | ZrB2 | 99.5% |
| Zirconium carbide | ZrC | 99.5% |
| Zirconium chloride | ZrCl4 | 99.5% |
| Zirconium fluoride | ZrF4 | 99.9% |
| Zirconium nitride | ZrN | 99.9% |
| Zirconium oxide | ZrO2 | 99.5% - 99.9% |
| Zirconium silicide | ZrSi2 | 99.9% |
| Zirconium oxide/Yttrium oxide (YSZ) | ZrO2/Y2O3 | 99.90% |
| Metals |
| Aluminium | Chromium | Lead | Platinum | Tantalum |
| Antimony | Cobalt | Lithium | Potassium | Tellurium |
| Barium | Gallium | Magnesium | Rhenium | Tin |
| Beryllium | Germanium | Manganese | Rhodium | Titanium |
| Bismuth | Gold | Molybdenum | Rubidium | Tungsten |
| Boron | Hafnium | Niobium | Ruthenium | Vanadium |
| Cadmium | Indium | Nickel | Selenium | Zinc |
| Calcium | Iridium | Osmium | Silicon | Zirkonium |
| Carbon | Iron | Palladium | Strontium | |
| Rare Earth |
| Cerium | Gadolinium | Neodymium | Terbium | Various Rare |
| Dysprosium | Holmium | Praseodymium | Thulium | Earth alloys |
| Erbium | Lutetium | Samarium | Ytterbium | |
| Europium | Lanthanum | Scandium | Yttrium | |
| Alloys |
| Al/B | Au/Pd | Co/Ni | Ge/Si | Pt/Ru |
| Al/Cu | Au/Pt | Co/Ta/Zr | Ge/Te | Pt/Ag |
| Al/Cu/Si | Au/Sn | Cr/SiO2Cermet | In/Sn | Sb/In |
| Al/Cr | Au/Zn | Cu/Al | Ir/Mn | Sb/In/Sn |
| Al/Li | Bi/Sb | Cu/Cr | Ni/Cr | Si/Al |
| Al/Mg | Bi/Sb/Se | Cu/Ga | Ni/Fe | Si/Cr |
| Al/Si | Bi/Sb/Se/Te | Cu/Ni | Ni/Ti | Ta/Ti |
| Al/Ti | Bi/Sb/Te | Cu/Sn | Ni/V | Ti/Al |
| Au/Sb | Bi/Se | Fe/Al/Si | Ni/Zr | Ti/W |
| Au/Ag | Bi/Te | Fe/Cr | Os/Ru | Ti/Zr |
| Au/B | Cd/Te | Fe/Mn | Pb/Se | W/Ti |
| Au/Be | So/Cr | Fe/Ru/Ga/Si | Pb/Te | Zn/Al |
| Au/Ge | Co/Fe | Fe/Si | Pb/Se/Te | Zr/Y |
| Au/Ir | Co/Nb/Zr | Fe/Si/B/C | Pd/Pt | ａnd others |
| Oxides |
| Al2O3 | CuO | PbZrO3 | Supercond. | Y2O3 |
| Sb2O3 | HfO2 unstab. | LiNbO3 | SrO | ZnO |
| BaTiO3 | HfO2/CaO | MgO | SrTiO3 | ZnO dop. |
| Bi2O3 | HfO2/Y2O3 | MoO3 | SrZrO3 | ZrO2 unstab. |
| Bi2TiO5 | In2O3 | Nb2O3 | Ta2O5 | ZrO2/CaO |
| Bi4Ti3O12 | ITO | Nb2O5 | ThO2 | ZrO2/Y2O3 |
| BiTiO3 | LaAlO3 | RE2O3 | SnO2 | |
| CeO2 | La2O3 | SiO2 | TiO2 | |
| CrO3 | PbTiO3 | SiO | WO3 | ａnd others |
| Borides |
| CrB2 | Mo2B6 | TiB2 | VB2 | |
| HfB2 | NbB2 | Wb | ZrB2 | |
| LaB6 | TaB2 | W2B | | ａnd others |
| Carbides |
| B4C | Mo2C | TaC | WC6%Co | ZrC |
| Cr3C2 | NbC | TiC | WC12%Co | |
| HfC | SiC | WC | VC | ａnd others |
| Fluorides |
| AlF3 | CeF3 | LiF | RE/NaF | YF3 |
| BaF2 | LaF3 | MgF2 | Na3AlF6 | |
| CaF2 | PbF2 | KF | ThF4 | ａnd others |
| Nitrides |
| AlN | HfN | Si3N4 | TiN | ZrN |
| BN | NbN | TaN | VN | ａnd others |
| Silicides |
| CrSi2 | MoSi2 | TaSi2 | Ti5Si3 | V3Si |
| Cr3Si | NbSi2 | Ta5Si3 | WSi2 | ZrSi2 |
| HfSi2 | PtSi | TiSi2 | VSi2 | ａnd others |
| Sulfides, Selenides, Tellurides |
| As2S3 | PbS | NbSe2 | TaTe2 | ZnS |
| CdSe | PbTe | Nb-S | WSe2 | ZnTe |
| CdSe | MoSe2 | NbTe2 | WsS2 | |
| CdTe | MoS2 | TaSe2 | WTe2 | |
| PbSe | MoTe2 | TaS2 | ZnSe | ａnd others |
