其他品牌 品牌
经销商厂商性质
丹东市所在地
Coastal Instruments 成立于1980年，是国内专业的流量计服务商。致力于进口质量流量计、压力传感器等压力测量器件的校准、维修及*。其技术*、高可靠性及诚信使其成为行业的，是专业的MFC技术服务商。
客思特设备（丹东）有限公司 专门经营进口气体质量流量计销售，全套校准证书，一年质保期。
本公司专业销售质量流量计近40年，具有丰富的销售和售后服务经验，我们有专业的服务团队和专业工程师对产品进行跟踪服务。
具体产品参数，价格请询价，请联系邹积坤经理
本公司主要经营的品牌有：
HORIBA
MKS
BROOKS
UNIT
AERA
MKS
MYKROLIS
MILLIPORE
SAM
STEC
alwaysstriving to develop and manufacture environmentally sound products.
A reliable support system with an international network
Using a network that has branches throughout the world, HORIBA STEC s highlyskilled engineers offer complete support for all HORIBA STEC products.
HORIBA STEC quickly and reliably supplies equipment to its customers through its
three main bases: Kyoto, which acts as HORIBA STEC s headquarters; Aso, the
HORIBA Group s mass production factory, which features the latest in production
equipment; and two bases in the United States (CA, TX), which act as ultra-quick
suppliers.
* The new Aso factory was completed in October 2005.
The superior dependability you expect from HORIBA STEC. Industryleader
HORIBA STEC, is a brand hailed by equipment manufacturers throughout the world,one of many indications that HORIBA STEC consistently supplies high-quality,
highly dependable products that meet the toughest standards.
Introducing the remarkable ,a break-through in mass flow control technology
The mass flow controller, is a key piece of semiconductor manufacturing equipment.Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process.
HORIBA STEC, a company that has consistently introduced high-quality, highly functional products
to the demanding semiconductor manufacturing market,
and thereby grown its worldwide market share to over 30%*1, has recently developed a new mass flow controller,
one that breaks the mold completely and will change the future of mass flow control technology.
That new mass flow controller is the SEC-Z500X.
It provides all the mass flow functions customers need, including the flexibility to handle different gas types and flow volumes.
The customer him or herself can alter its specifications to suit changing needs*2.
The unit is also RoHS compliant, which makes it the perfect environmentally friendly tool for improving corporate value.
The highly functional, high added value ‘X’ is brimming with previously unknown charm.
The world is witnessing the birth of a mass flow controller that will change the future of the semiconductor industry.
*1 From VLSI’s 2005 Research Report.*2 Multi-gas, multi-range functio
Multi-gas, multi-range solution
N2 100 SCCMAr 110 SCCM
B2H655 SCCM
Example:SEC-Z500X MR.MG02
Example:
SEC-Z500X MR.MG04
N2 1000 SCCM N2 250 SCCM
Flow rate control range20 to 1000 SCCM
Flow rate control range
5 to 250 SCCM
Suitable for multiple ranges
Freely change the full scale
Configuration software that allows the user to alter specifications on-site
The SEC-Z500X offers multi-gas, multi-range functionality, thanks to itsconfiguration software. This software makes it possible to select
MR/MG numbers simply by entering the type of gas being used and the
flow rate range, and also features a handy N2
gas conversion feature for flow rate
measurements using N2 gas during receipt
inspections. To ensure that the software is used
without error, HORIBA STEC offers software
operation seminars. For information on these
seminars, please contact your HORIBA STEC
representative.
Changing the full-scale flow rate
List of full-scale flow rates for different gases
Even when the same full-scale values are used, the MR/MG numbersassociated with the full-scale flow rate values for the calibration gas
may vary, due to variations in the thermal conductivity of the different
process gases. To increase flow rate calibration precision, HORIBA
STEC offers the following lineup of MR/MG numbers.
Suitable for multiple types of gas
Freely change types of gasHORIBA STEC has made it possible for the user to change the type of
gas or full-scale flow rate on site. Our special Z500 configuration
software makes it possible to change these specifications at will. Best
of all, the changes can be made without removing the mass flow
controller from the gas panel or piping. This reduces the number of
spare mass flow controllers users need to store, and helps save both
time and money.
The customer can supply all the system components listed above, if desired, except for the software, which mustbe provided by HORIBA STEC. Please consult your HORIBA STEC representative for more detailed specifications.
Name
ComputerSoftware
Communications converter
(serial)
Conversion adapter (CA-DP9RJ45)
RS232C cableLAN cable
USB serial converter
Label printer
Notes
OS: Japanese or English, Windows® 2000 / XP / VistaConfiguration software
HORIBA STEC offers seminars detailing the use of the software.
RS-485
Communications converter to LAN cable
PC to communications converter
LAN cable for SEC-Z500X communications
Required for computers that do not have a serial port
Please consult your HORIBA STEC representative for further information
PC (Windows)SEC-Z500
Configuration Software
CA-DP9RJ45 Serial
Serial Converter
RS232C Converter
cableRS485 LAN cable
SC-EDH signal cable RS232C cable
PrinterPAC-D2X or
similar power
supply
+15, -15 Volts DC
SEC-Z500XMinimum flow rate — maximum flow rate
3 – 10 — — — — — R01 8 – 30 12 – 35 8 – 30 5 – 11 5 – 9 — 01 25 – 100 35 – 110 25 – 100 9 – 36 16 – 31 5 – 6 02 75 – 300 110 – 350 75 – 300 28 – 100 44 – 86 10 – 20 03 250 – 1000 350 – 1100 250 – 1000 90 – 350 150 – 280 34 – 67 04 750 – 3000 1100 – 3500 750 – 3000 260 – 1000 470 – 930 110 – 200 05 2500 – 10000 3500 – 11000 2500 – 10000 780 – 3100 1600 – 3100 360 – 700 06 — — R1.5 9 – 17 — 1.5 25 – 50 6 – 11 2.5 79 – 150 19 – 37 3.5 280 – 540 60 – 110 4.5 860 – 1700 190 – 370 5.5 10000 – 30000 10000 – 30000 10000 – 30000 — — — 07 30000 – 50000 30000 – 50000 30000 – 50000 — — — 08 — — 6.5 SEC-Z51■X series MR/MG number
Gas type
N2 Ar H2 SF6 HBr WF6 SEC-Z52■X series
