小型回转PECVD系统BTF-1200C-R-S-PECVD/Small rotary type PECVD

连续回转PECVD系统 BTF-1200C-RP-PECVD/Continuous rotary PECVD system

等离子体增强回转PECVD系统 BTF-1200C-R-PECVD/Plasma enhanced rotational PECVD system

自动进料回转CVD系统