中级会员第 3 年经销商
参考价：
-
- 面议
D212 D214压力钝感质量流量计
具体成交价以合同协议为准
2023-10-14
- 型号
该企业相似产品
产品简介
概要高稳定性的质量流量计－气体流量控制不受上流和下流端压力变化的影响
详细信息
概要
高稳定性的质量流量计－气体流量控制不受上流和下流端压力变化的影响。不同压力感测，采用压力钝感模式
特征
- 采用不同压力感测即钝感模式
- 缩小气体柜的体积（不再需要压力传感器，调压阀和过滤器）
- 流量控制量程范围厂
- 精度高
- 提高产能－可以提供标准流量给半导体制程。
规格
| D212 | |||
|---|---|---|---|---|
Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | ||
Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | ||
Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) |
Accuracy under Digital mode | ±1% S.P. | ±1% S.P. | ±1% S.P. | ±1% S.P. |
Control Range under Digital mode (% F.S.) | 2.5% ~ 99% | 30 ~ 99% | 0.5 ~ 99% | 2 ~ 99% |
Recommended Re-Zero Term | once/ year | |||
Valve Type (PIEZO) | Normally Close | |||
Linearity | ±0.5% F.S. | |||
Repeatability | ±0.3% S.P. ( 10~99%) | |||
Response Time | 800 msec. | |||
Proof Pressure | 500kPa(g) | |||
Burst Pressure | 1MPa(g) | |||
Leak Integrity | <5×10-12 Pa·m3/s (He) | |||
Wetted Materials | SUS-316L , INCONEL | |||
Operating Temperature | 15 ~ 45°C | |||
Flow Rate Setting Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
Flow Rate Output Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
Power Requirement | ± 15V ± 5%, 150 mA | |||
Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | |||
Installation Orientation | Attitude Insensitive | |||
| D214 | ||||
|---|---|---|---|---|---|
Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | |||
Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | |||
Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) | |
Accuracy under Digital mode | ±1% S.P. (35 ~ 99%) | ±1% S.P. ( 50 ~ 99%) | ±1% S.P. ( 5 ~ 99%) | ±1% S.P. ( 10 ~ 99%) | |
Control Range under Digital mode | 2.5% ~ 99% F.S. | 30 ~ 99% F.S. | 0.5 ~ 99% F.S. | 2 ~ 99% F.S. | |
Recommended Re-Zero Term | once/ year | ||||
Valve Type (PIEZO) | Normally Close | ||||
Linearity | ±0.5% F.S. | ||||
Repeatability | ±0.3% S.P. ( 10~99%) | ||||
Response Time | 800 msec. | ||||
Proof Pressure | 500kPa(g) | ||||
Burst Pressure | 1MPa(g) | ||||
Leak Integrity | <5×10 -12 Pa·m 3 /s (He) | ||||
Wetted Materials | SUS-316L , INCONEL | ||||
Operating Temperature | 15 ~ 45°C | ||||
Flow Rate Setting Signal | Device Net | ||||
Flow Rate Output Signal | Device Net | ||||
Power Requirement | 11~25VDC 4VA | ||||
Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | ||||
Installation Orientation | Attitude Insensitive | ||||
NOTE |
| ||||
There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it. | |||||
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