setra西特C25高纯气体压力变送器半导体用

setra西特C25高纯气体压力变送器半导体用

setra

SetraC25系列超高纯压力变送器专门设计用于半导体工艺过程中的超高纯气体输送系统以及要求超洁净工作、高吞吐量和超高长期稳定性的控制应用。

C25系列采用可旋转的外罩结构，用户可方便地调节用于零点和量程微调的多圈电位计。标准的外螺纹/内螺纹端面密封压力接口可满足半导体行业的要求。此外，该系列产品还可选多种其他接口类型。C25系列产品提供5VDC、10VDC或4-20mA三种输出类型，可使用六英尺多芯电缆及卡口、DSub或M12x1接头进行电气连接。

Model C25超高纯压力变送器

特性

泄露率低

VCR接头

C25系列压力变送器采用Setra的可变电容技术，配有VIM/VAR316L不锈钢隔膜和绝缘电极板。绝缘电极板与传感器本地构成可变电容，当气体压力升高时，隔膜会变得略圆，使电容减小，传感器检测到电容变化，并将其转换为高精度的线性直流电信号。几乎不受EMI/RFI干扰。

在制造和装配完成后，Setra超高纯压力变送器还要接受去离子水冲洗、高纯氮气吹扫、烘干、双层包装、氮气充注和密封等处理，最后才发货。

注:Setra的质量标准是根据ANSl-Z540制定的。该产品的

标定具有NIST可追踪性，。

Vacuum Coupling Radius，金属面密封，以下简称 VCR。

易于吹扫的小腔室

200PSI/250PSI/3000PSI

316LVIM/VAR不锈钢

表面抛光度7Ra

1X10°ATM.CC/sec级别的氦渗漏实验

坚固耐用，

4-20mA输出型获得不易燃认证，适用于潜在危险区域

·符合CE标准要求

应用

高纯度气体输送系统

半导体过程工具

·气柜

setra西特C25高纯气体压力变送器半导体用

C25G050PGC41106 C25G050PGC411B1,

C25G050PGC411D1 C25G050PGC411M4 

C25G050PGC42B06,C25G050PGC42BB1,

C25G050PGC42B1D1 C25G050PGC42BM4

C25G050PGC42C06, C25G050PGC42CB1,

C25G050PGC42C1D1,C25G050PGC42CM4

C25G050PGD41106 C25G050PGD411B1,

C25G050PGD411D1 C25G050PGD411M4 

C25G050PGD42B06,C25G050PGD42BB1,

C25G050PGD42B1D1 C25G050PGD42BM4

C25G050PGD42C06, C25G050PGD42CB1,

C25G050PGD42C1D1,C25G050PGD42CM4

C25G100PGC41106 C25G100PGC411B1,

C25G100PGC411D1 C25G100PGC411M4 

C25G100PGC42B06,C25G100PGC42BB1,

C25G100PGC42B1D1 C25G100PGC42BM4

C25G100PGC42C06, C25G100PGC42CB1,

C25G100PGC42C1D1,C25G100PGC42CM4

C25G100PGD41106 C25G100PGD411B1,

C25G100PGD411D1 C25G100PGD411M4 

C25G100PGD42B06,C25G100PGD42BB1,

C25G100PGD42B1D1 C25G100PGD42BM4

C25G100PGD42C06, C25G100PGD42CB1,

C25G100PGD42C1D1,C25G100PGD42CM4

C25G250PGC41106 C25G250PGC411B1,

C25G250PGC411D1 C25G250PGC411M4 

C25G250PGC42B06,C25G250PGC42BB1,

C25G250PGC42B1D1 C25G250PGC42BM4

C25G250PGC42C06, C25G250PGC42CB1,

C25G250PGC42C1D1,C25G250PGC42CM4

C25G250PGD41106 C25G250PGD411B1,

C25G250PGD411D1 C25G250PGD411M4 

C25G250PGD42B06,C25G250PGD42BB1,

C25G250PGD42B1D1 C25G250PGD42BM4

C25G250PGD42C06, C25G250PGD42CB1,

C25G250PGD42C1D1,C25G250PGD42CM4 

C25G30CPGPGC41106 C25G30CPGPGC411B1,

C25G30CPGPGC411D1 C25G30CPGPGC411M4 

C25G30CPGPGC42B06,C25G30CPGPGC42BB1,

C25G30CPGPGC42B1D1 C25G30CPGPGC42BM4

C25G30CPGPGC42C06, C25G30CPGPGC42CB1,

C25G30CPGPGC42C1D1,C25G30CPGPGC42CM4

C25G30CPGPGD41106 C25G30CPGPGD411B1,

C25G30CPGPGD411D1 C25G30CPGPGD411M4 

C25G30CPGPGD42B06,C25G30CPGPGD42BB1,

C25G30CPGPGD42B1D1 C25G30CPGPGD42BM4

C25G30CPGPGD42C06, C25G30CPGPGD42CB1,

C25G30CPGPGD42C1D1,C25G30CPGPGD42CM4 

C25G1R7BGC41106 C25G1R7BGC411B1,

C25G1R7BGC411D1 C25G1R7BGC411M4 

C25G1R7BGC42B06,C25G1R7BGC42BB1,

C25G1R7BGC42B1D1 C25G1R7BGC42BM4

C25G1R7BGC42C06, C25G1R7BGC42CB1,

C25G1R7BGC42C1D1,C25G1R7BGC42CM4

C25G1R7BGD41106 C25G1R7BGD411B1,

C25G1R7BGD411D1 C25G1R7BGD411M4 

C25G1R7BGD42B06,C25G1R7BGD42BB1,

C25G1R7BGD42B1D1 C25G1R7BGD42BM4

C25G1R7BGD42C06, C25G1R7BGD42CB1,

C25G1R7BGD42C1D1,C25G1R7BGD42CM4

 C25G007BGC41106 C25G007BGC411B1,

C25G007BGC411D1 C25G007BGC411M4 

C25G007BGC42B06,C25G007BGC42BB1,

C25G007BGC42B1D1 C25G007BGC42BM4

C25G007BGC42C06, C25G007BGC42CB1,

C25G007BGC42C1D1,C25G007BGC42CM4

C25G007BGD41106 C25G007BGD411B1,

C25G007BGD411D1 C25G007BGD411M4 

C25G007BGD42B06,C25G007BGD42BB1,

C25G007BGD42B1D1 C25G007BGD42BM4

C25G007BGD42C06, C25G007BGD42CB1,

C25G007BGD42C1D1,C25G007BGD42CM4

C25G017BGC41106 C25G017BGC411B1,

C25G017BGC411D1 C25G017BGC411M4 

C25G017BGC42B06,C25G017BGC42BB1,

C25G017BGC42B1D1 C25G017BGC42BM4

C25G017BGC42C06, C25G017BGC42CB1,

C25G017BGC42C1D1,C25G017BGC42CM4

C25G017BGD41106 C25G017BGD411B1,

C25G017BGD411D1 C25G017BGD411M4 

C25G017BGD42B06,C25G017BGD42BB1,

C25G017BGD42B1D1 C25G017BGD42BM4

C25G017BGD42C06, C25G017BGD42CB1,

C25G017BGD42C1D1,C25G017BGD42CM4

C25G250PCC41106 C25G250PCC411B1,

C25G250PCC411D1 C25G250PCC411M4 

C25G250PCC42B06,C25G250PCC42BB1,

C25G250PCC42B1D1 C25G250PCC42BM4

C25G250PCC42C06, C25G250PCC42CB1,

C25G250PCC42C1D1,C25G250PCC42CM4

C25G250PCD41106 C25G250PCD411B1,

C25G250PCD411D1 C25G250PCD411M4 

C25G250PCD42B06,C25G250PCD42BB1,

C25G250PCD42B1D1 C25G250PCD42BM4

C25G250PCD42C06, C25G250PCD42CB1,

C25G250PCD42C1D1,C25G250PCD42CM4

C25G30CPCC41106 C25G30CPCC411B1,

C25G30CPCC411D1 C25G30CPCC411M4 

C25G30CPCC42B06,C25G30CPCC42BB1,

C25G30CPCC42B1D1 C25G30CPCC42BM4

C25G30CPCC42C06, C25G30CPCC42CB1,

C25G30CPCC42C1D1,C25G30CPCC42CM4

C25G30CPCD41106 C25G30CPCD411B1,

C25G30CPCD411D1 C25G30CPCD411M4 

C25G30CPCD42B06,C25G30CPCD42BB1,

C25G30CPCD42B1D1 C25G30CPCD42BM4

C25G30CPCD42C06, C25G30CPCD42CB1,

C25G30CPCD42C1D1,C25G30CPCD42CM4

C25G202PCC41106 C25G202PCC411B1,

C25G202PCC411D1 C25G202PCC411M4 

C25G202PCC42B06,C25G202PCC42BB1,

C25G202PCC42B1D1 C25G202PCC42BM4

C25G202PCC42C06, C25G202PCC42CB1,

C25G202PCC42C1D1,C25G202PCC42CM4

C25G202PCD41106 C25G202PCD411B1,

C25G202PCD411D1 C25G202PCD411M4 

C25G202PCD42B06,C25G202PCD42BB1,

C25G202PCD42B1D1 C25G202PCD42BM4

C25G202PCD42C06, C25G202PCD42CB1,

C25G202PCD42C1D1,C25G202PCD42CM4

C25G205PCC41106 C25G205PCC411B1,

C25G205PCC411D1 C25G205PCC411M4 

C25G205PCC42B06,C25G205PCC42BB1,

C25G205PCC42B1D1 C25G205PCC42BM4

C25G205PCC42C06, C25G205PCC42CB1,

C25G205PCC42C1D1,C25G205PCC42CM4

C25G205PCD41106 C25G205PCD411B1,

C25G205PCD411D1 C25G205PCD411M4 

C25G205PCD42B06,C25G205PCD42BB1,

C25G205PCD42B1D1 C25G205PCD42BM4

C25G205PCD42C06, C25G205PCD42CB1,

C25G205PCD42C1D1,C25G205PCD42CM4

JIU

C25G007BCC41106 C25G007BCC411B1,

C25G007BCC411D1 C25G007BCC411M4 

C25G007BCC42B06,C25G007BCC42BB1,

C25G007BCC42B1D1 C25G007BCC42BM4

C25G007BCC42C06, C25G007BCC42CB1,

C25G007BCC42C1D1,C25G007BCC42CM4

C25G007BCD41106 C25G007BCD411B1,

C25G007BCD411D1 C25G007BCD411M4 

C25G007BCD42B06,C25G007BCD42BB1,

C25G007BCD42B1D1 C25G007BCD42BM4

C25G007BCD42C06, C25G007BCD42CB1,

C25G007BCD42C1D1,C25G007BCD42CM4

C25G017BCC41106 C25G017BCC411B1,

C25G017BCC411D1 C25G017BCC411M4 

C25G017BCC42B06,C25G017BCC42BB1,

C25G017BCC42B1D1 C25G017BCC42BM4

C25G017BCC42C06, C25G017BCC42CB1,

C25G017BCC42C1D1,C25G017BCC42CM4

C25G017BCD41106 C25G017BCD411B1,

C25G017BCD411D1 C25G017BCD411M4 

C25G017BCD42B06,C25G017BCD42BB1,

C25G017BCD42B1D1 C25G017BCD42BM4

C25G017BCD42C06, C25G017BCD42CB1,

C25G017BCD42C1D1,C25G017BCD42CM4

C25G050PAC41106 C25G050PAC411B1,

C25G050PAC411D1 C25G050PAC411M4 

C25G050PAC42B06,C25G050PAC42BB1,

C25G050PAC42B1D1 C25G050PAC42BM4

C25G050PAC42C06, C25G050PAC42CB1,

C25G050PAC42C1D1,C25G050PAC42CM4

C25G050PAD41106 C25G050PAD411B1,

C25G050PAD411D1 C25G050PAD411M4 

C25G050PAD42B06,C25G050PAD42BB1,

C25G050PAD42B1D1 C25G050PAD42BM4

C25G050PAD42C06, C25G050PAD42CB1,

C25G050PAD42C1D1,C25G050PAD42CM4

C25G100PAC41106 C25G100PAC411B1,

C25G100PAC411D1 C25G100PAC411M4 

C25G100PAC42B06,C25G100PAC42BB1,

C25G100PAC42B1D1 C25G100PAC42BM4

C25G100PAC42C06, C25G100PAC42CB1,

C25G100PAC42C1D1,C25G100PAC42CM4

C25G100PAD41106 C25G100PAD411B1,

C25G100PAD411D1 C25G100PAD411M4 

C25G100PAD42B06,C25G100PAD42BB1,

C25G100PAD42B1D1 C25G100PAD42BM4

C25G100PAD42C06, C25G100PAD42CB1,

C25G100PAD42C1D1,C25G100PAD42CM4

C25G250PAC41106 C25G250PAC411B1,

C25G250PAC411D1 C25G250PAC411M4 

C25G250PAC42B06,C25G250PAC42BB1,

C25G250PAC42B1D1 C25G250PAC42BM4

C25G250PAC42C06, C25G250PAC42CB1,

C25G250PAC42C1D1,C25G250PAC42CM4

C25G250PAD41106 C25G250PAD411B1,

C25G250PAD411D1 C25G250PAD411M4 

C25G250PAD42B06,C25G250PAD42BB1,

C25G250PAD42B1D1 C25G250PAD42BM4

C25G250PAD42C06, C25G250PAD42CB1,

C25G250PAD42C1D1,C25G250PAD42CM4

 C25G30CPAC41106 C25G30CPAC411B1,

C25G30CPAC411D1 C25G30CPAC411M4 

C25G30CPAC42B06,C25G30CPAC42BB1,

C25G30CPAC42B1D1 C25G30CPAC42BM4

C25G30CPAC42C06, C25G30CPAC42CB1,

C25G30CPAC42C1D1,C25G30CPAC42CM4

C25G30CPAD41106 C25G30CPAD411B1,

C25G30CPAD411D1 C25G30CPAD411M4 

C25G30CPAD42B06,C25G30CPAD42BB1,

C25G30CPAD42B1D1 C25G30CPAD42BM4

C25G30CPAD42C06, C25G30CPAD42CB1,

C25G30CPAD42C1D1,C25G30CPAD42CM4