中级会员第 5 年经销商
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武汉市MKS气体流量控制器AR流量计GE50A004102SBV020广东供应
具体成交价以合同协议为准
2026-05-29
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产品简介
MKS气体流量控制器AR流量计GE50A004102SBV020
MKS气体流量控制器AR流量计GE50A004102SBV020深圳市天铉真空技术有限公司供应美国真空计流量计真空泵分子泵激光器INFICON皮拉尼PSG500、PSG502-S、PSG510-S和PSG512-S型标准真空计采用当今市场上的数字皮拉尼技术
详细信息
MKS气体流量控制器AR流量计GE50A004102SBV020
深圳市天铉真空技术有限公司供应美国真空计流量计真空泵分子泵激光器
INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型标准真空计采用当今市场上的数字皮拉尼技术。 不锈钢传感器单元坚固耐用，结构设计紧凑，适用于半导体系统和标准应用，例如前级真空管。
益处
- 轻松一键调节 ATM 和 HV
- 节省空间的坚固设计
- 铝质壳体
- 可在任意方向安装
- 不锈钢测量单元，带金属密封馈入装置
- 便于集成的对数信号输出
- 螺纹接头，具有 10 巴过压能力
- 250 °C 烘烤型
- 在腐蚀应用中可选购镍丝
- 陶瓷馈入装置，适用于腐蚀性的应用 (PSG510 & PSG512)
- 可选设定点
- RoHS 合规
- 高真空电离真空计控制
- 前级真空压力监控
- 真空系统中的安全电路
- 高真空和低真空范围内的一般真空测量和控制
类型
| PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | ||
| 测量原则 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | |
| 精度 (N2) | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
| 5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 可重复性（空气） | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
| 输出信号（测量信号） | ||||||
| 电压范围 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
| 测量范围 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
| 测量范围（空气、O2、CO、N2） | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
| 设定点 | ||||||
| 设定点数量 | 2 | 2 | 2 | 2 | ||
| 设置范围 | mbar | ‒ | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
| 滞后 | % of reading | ‒ | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
| 继电器触点 | V (dc) A (dc) | ‒ | 30 | 30 | 30 | 30 |
| 继电器触点： 转换时间 | ms | ‒ | <20 | <20 | <20 | <20 |
| 电源电压 | ||||||
| 真空计上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
| 波纹 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 电压与压强 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | |
| 内部容积 | ||||||
| DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF | cm³ (in.³) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
| DN 16 ISO-KF & DN 16 CF-R 长管 | cm³ (in.³) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
| 1/8'' NPT，4 VCR，8 VCR，1/2'' 管 | cm³ (in.³) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
| 容许温度 | ||||||
| 运行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
| 真空连接 (1) | °C | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) |
| 贮存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
| 重量 | ||||||
| DN 16 ISO-KF，7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
| DN 16 CF-R，4 VCR | g | 100 | 100 | 100 | 100 | 100 |
| 1/8'' NPT，1/2'' 管 | g | 70 | 70 | 70 | 70 | 70 |
| 8 VCR，DN 16 ISO-KF 长管 | g | 130 | 130 | 130 | 130 | 130 |
| DN 16 CF-R 长管 | g | 140 | 140 | 140 | 140 | 140 |
| 错误信号 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
| 输出电阻 | Ω | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
| *小负载电阻 | kΩ | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
| 反应时间 | ms | 80 | 80 | 80 | 80 | 80 |
| 真空计识别 | kΩ | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
| 调整 | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | |
| 电流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
| 功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 电气连接 | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | |
| 传感器电缆 | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | |
| 电缆长度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
| 暴露于真空的材料 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | |
| 单丝 | W | W | Ni | W | Ni | |
| 容许压力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
| 安装定位 | any | any | any | any | any | |
| 保护等级 | IP40 | IP40 | IP40 | IP40 | IP40 | |
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