| 工作台行程 | 标配:X=150mm, Y=150mm, Z=100mm | 选配:X: 100mm~400mm;Y: 100mm~200mm;Z: 100mm-150mm | 光学尺分辨率 | 标配:0.001mm闭式; 选配:0.0005mm闭式,0.0001mm开式 | 重复定位精度 | X,Y,Z: ≤0.0015mm | 重复调焦精度(倍率大于150X) | ≤0.0015mm | 系统不确定度 | 分辨率为0.001mm时:X,Y: (3.0+2×L/400)/1000 (mm),Z≤0.005mm | 分辨率为0.0005mm时:X,Y: (1.5+2×L/400)/1000 (mm),Z≤0.005mm | 分辨率为0.0001mm时:X,Y: (0.5+2×L/400)/1000 (mm),Z≤0.005mm | | |