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BAG302 Medium to Ultra High Vacuum Gauge

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2022-03-08
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产品简介
BAG302 Medium to Ultra High Vacuum Gauge
详细信息

好处

  • Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
  • Two standard long-life yttrium oxide coated iridium filaments
  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
  • Bright digital OLED display with keypad for simple setup, operation and programming
  • User programmable set point relay
  • User programmable display units in mbar, Torr or Pa
  • User selectable Auto-ranging of emission current
  • Mechanical strength and ruggedness
  • Choice of various flange options
  • Easy to exchange sensing element
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)

    (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)

典型应用

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

新闻

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规格

类型 BAG302
Messurement range 1.3 x 10-9 ... 6.7 x 10-2
Accuracy (N2)  
1.3×10-8 … 6.7 ×10-2 mbar % of reading ±15
1×10-8 … 5×10-2 Torr % of reading ±15
Repeatability % of reading ±5
Degas  
p < 6.7="" x="">-5 mbar electron bombardment, 2 min (default)
p < 5.00="" x="">-5 Torr (programmable between 2 ... 10 min)
Temperature  
Operation (ambient) °C 0 ... +40
Storage °C -40 ... +70
Bakeout at flange (sensor only, electrics removed) °C 200
Supply voltage V (dc) +20 ... +28
Output signal analog V 0 ... +9 (log-linear)
Voltage vs. pressure volts per decade 1
Setpoint relay 1 (single-pole double-throw relay (SPDT))
1 A at 30 V (dc) resistive, or V (ac) non-inductive
Electrical connection D-Sub, 9-pin, male for analog,D-Sub, 9-pin, female for RS485
Interface (digital) RS485
Emission control manual
Filament two Yt2O2 coated Ir
Filament status display / digital output
Digital functions degas, filament on/off and emission control
Materials exposed to vacuum Yt2O3, Ir, W, Ta, stainless steel, glass, Ni
Mounting orientation any
Internal volume cm³ (in.³) 16.4 (1.0)
Weight KF / CF 270

零件号

BAG302
零件号 明细
352-050 BAG302-S 9DSub,1SP,OLED,16KF
352-051 BAG302-S 9DSub,1SP,OLED,25KF
352-052 BAG302-S 9DSub,1SP,OLED,40KF
352-053 BAG302-S 9DSub,1SP,OLED,16CFR
352-054 BAG302-S 9DSub,1SP,OLED,40CFR
352-055 BAG302-S 9DSub,1SP,OLED,3/4in. Tube
352-056 BAG302-S 9DSub,1SP,OLED,8VCR

备件

BAG302
零件号 明细
352-060 BAG302 Spare sensor 16KF
352-061 BAG302 Spare sensor 25KF
352-062 BAG302 Spare sensor 40KF
352-063 BAG302 Spare sensor 16CFR
352-064 BAG302 Spare sensor 40CFR
352-065 BAG302 Spare sensor 3/4in. Tube
352-066 BAG302 Spare sensor 1/8NPT

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